Sentaurus TCAD模型创建、激活电极等

Sentaurus TCAD资料很少，这里提供一点给各位参考
1 矩形
The corresponding Scheme command is:

(sdegeo:create-rectangle position position material-name region-name)

For example:

(sdegeo:create-rectangle (position 0 0 0) (position 2 1 0) "Silicon"
"R.Substrate")

2 正多边形
在精确坐标模式下，会显示一个对话框，您可以在其中输入中心点的坐标、半径、边数以及起始角度。
The corresponding Scheme command is:

(sdegeo:create-reg-polygon center-position radius number_of_faces start_angle
material-name region-name)

For example:

(sdegeo:create-reg-polygon (position 0 0 0) 1.0 3 30 "Nitride"
"R.TriangleSpacer")

3 多边形
在精确坐标模式下，将显示一个对话框，您可以在其中输入每个顶点的坐标
The corresponding Scheme command is:

(sdegeo:create-polygon list-of-positions material-name region-name)

For example:

(sdegeo:create-polygon (list (position 0 0 0) (position 0.5 -1 0)
(position 1 -1 0) (position 1.5 0 0) (position 0 0 0))
"PolySilicon" "R.TaperedPoly")

4圆角
The corresponding Scheme command is:

(sdegeo:fillet-2d vertex-list radius)

For example:

(sdegeo:create-rectangle (position 0 0 0.0) (position 1 1 0.0) "Silicon"
"region_1")
(sdegeo:fillet-2d (list
(car (find-vertex-id (position 1 0 0)))
(car (find-vertex-id (position 0 0 0)))) 0.4)

3D
5 长方体
在精确坐标模式下，将显示一个对话框，您可以在其中输入空间对角线的第一个顶点和第二个顶点的坐标。
The corresponding Scheme command is:
(sdegeo:create-cuboid position position material-name region-name)

For example:

(sdegeo:create-cuboid (position 0 0 0) (position 1 2 3) "Silicon"
"R.Substrate")

6 激活电极
The corresponding Scheme command is:

(sdegeo:define-contact-set contact-name edge-thickness
(color:rgb r g b) pattern)

For example:
(sdegeo:define-contact-set “substrate” 4 (color:rgb 1 0 0) “##”)
(sdegeo:set-current-contact-set “substrate”)
red=(color:rgb 1 0 0)
green=(color:rgb 0 1 0)
blue=(color:rgb 0 0 1)
yellow=(color:rgb 1 1 0)
cyan=(color:rgb 0 1 1)
purple=(color:rgb 1 0 1)
gray=(color:rgb 0.5 0.5 0.5)
7将边和面指定给电极

The corresponding Scheme commands for 2D and 3D, respectively, are:

(sdegeo:define-2d-contact edge|edge-list contact-name)
(sdegeo:define-3d-contact face|face-list contact-name)

The name of the contact can either be given explicitly, for example “gate”, or the currently
active contact can be referenced automatically with the Scheme command:

(sdegeo:get-current-contact-set)

For example for 2D:

(sdegeo:create-rectangle (position 0.0 0.0 0) (position 1.0 1.0 0)
"Silicon" "region_1")
(sdegeo:define-contact-set "cont" 4 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "cont")
(sdegeo:define-2d-contact (find-edge-id (position 0.5 0.0 0))
(sdegeo:get-current-contact-set))

For example for 3D:

(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.0 1.0 1.0)
"Silicon" "region_1")
(sdegeo:define-contact-set "cont" 4 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "cont")
(sdegeo:define-3d-contact (find-face-id (position 0.5 0.5 1.0))
(sdegeo:get-current-contact-set))

8将区域边界分配给联系人
The corresponding Scheme commands for 2D and 3D, respectively, are:

(sdegeo:set-contact-boundary-edges body|body-list)
(sdegeo:set-contact-boundary-faces body|body-list)

For example for 2D:

(sde:clear)
(sdegeo:create-rectangle (position 0.0 0.0 0) (position 1.0 1.0 0)
"Silicon" "region_1")
(sdegeo:set-default-boolean "ABA")
(define VIA (sdegeo:create-rectangle
(position 0.25 0.75 0) (position 0.75 1.5 0) "Metal" "region_2"))
(sdegeo:define-contact-set "cont" 4 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "cont")
(sdegeo:set-contact-boundary-edges VIA)
(sdegeo:delete-region VIA)

For example for 3D:

(sde:clear)
(sdegeo:create-cuboid (position 0.0 0.0 0.0) (position 1.0 1.0 1.0)
"Silicon" "region_1")
(sdegeo:set-default-boolean "ABA")
(define VIA (sdegeo:create-cuboid
(position 0.25 0.25 0.75) (position 0.75 0.75 1.5) "Metal" "region_2"))
(sdegeo:define-contact-set "cont" 4 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "cont")
(sdegeo:set-contact-boundary-faces VIA)
(sdegeo:delete-region VIA

9创建用于接触的新边或面
只能将整个边或面指定给接触。如果接触仅覆盖边或面的一部分，则必须明确分割边或面。

例如，以下方案命令创建一个矩形，通过插入两个新顶点将其一条边分割为三段，并指定接触"cont1"给侧边部分

(sdegeo:create-rectangle (position 0 0 0) (position 1 1 0) "Silicon"
"region_1")
(sdegeo:insert-vertex (position 0.3 0.0 0.0))
(sdegeo:insert-vertex (position 0.7 0.0 0.0))
(sdegeo:define-contact-set "cont1" 4.0 (color:rgb 1.0 0.0 0.0) "##")
(sdegeo:set-current-contact-set "cont1")
(sdegeo:define-2d-contact (find-edge-id (position 0.15 0 0))
(sdegeo:get-current-contact-set))
(sdegeo:define-contact-set "cont2" 4.0 (color:rgb 0.0 1.0 0.0) "##")
(sdegeo:set-current-contact-set "cont2")
(sdegeo:define-2d-contact (find-edge-id (position 0.85 0 0))
(sdegeo:get-current-contact-set))

截图128
10 电极分配示例
①第一个示例说明了不同2D电极的创建。
设备几何图形的创建:

(sdegeo:create-rectangle (position -1.0 0.0 0) (position 1.0 1.0 0)
"Silicon" "R.Substrate")
(sdegeo:create-rectangle (position -0.4 0.0 0) (position 0.4 -0.05 0)
"Oxide" "R.Gox")
(sdegeo:create-rectangle (position -0.4 -0.05 0) (position 0.4 -0.5 0)
"Nitride" "R.Spacer")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-rectangle (position -0.2 -0.05 0) (position 0.2 -0.5 0)
"PolySi" "R.Poly")
(define TMP (sdegeo:create-elliptical-sheet
(position -1.0 0.0 0) (position -0.5 0.00 0) 0.2 "Silicide" "R.Silicide"))
(sdegeo:delete-region TMP)

指定现有边给"substrate"电极

(sdegeo:define-contact-set "substrate" 4 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "substrate")
(sdegeo:define-2d-contact (find-edge-id (position 0.0 1.0 0))
(sdegeo:get-current-contact-set))
(render:rebuild)

(render:rebuild)命令强制在视图窗口中显示接触

分割边并将原始边的一部分分配给"drain"电极

(sdegeo:insert-vertex (position 0.5 0.0 0))
(sdegeo:define-contact-set "drain" 4 (color:rgb 0 1 0) "##")
(sdegeo:set-current-contact-set "drain")
(sdegeo:define-2d-contact (find-edge-id (position 0.75 0.0 0))
(sdegeo:get-current-contact-set))
(render:rebuild)

将所有区域边界边指定给"gate" 电极

(sdegeo:define-contact-set "gate" 4 (color:rgb 0 0 1) "##")
(sdegeo:set-current-contact-set "gate")
(sdegeo:set-contact-boundary-edges (find-body-id (position 0 -0.275 0))
(sdegeo:get-current-contact-set))
(sdegeo:delete-region (find-body-id (position 0 -0.275 0)))

使用一个方便得技巧将沿复杂拓扑的边指定给"source"电极
In the Old Replaces New (BAB) overlap resolution mode (see Overlap Behavior on page 54), a
dummy body is created that includes all boundary edges, which should be assigned to the
“source” contact. Then, the region boundary edges of this dummy body are assigned to the
“source” contact, and the dummy body itself is deleted:

(sdegeo:set-default-boolean "BAB")
(define DUMMY (sdegeo:create-rectangle (position -1.0 -0.3 0)
(position -0.45 0.2 0) "Aluminum" "R.Dummy"))
(sdegeo:define-contact-set "source" 4 (color:rgb 1 0 1) "##")
(sdegeo:set-current-contact-set "source")
(sdegeo:set-contact-boundary-edges DUMMY (sdegeo:get-current-contact-set))
(sdegeo:delete-region DUMMY)

截图129

第二个示例说明了不同3D接触的创建。
设备几何图形的创建:Creation of the device geometry:

(sdegeo:create-cuboid (position -1.0 0.0 0.0) (position 1.0 1.0 -1.0)
"Silicon" "R.Substrate")
(sdegeo:create-cuboid (position -0.4 0.0 0.0) (position 0.4 1.0 0.05)
"Oxide" "R.Gox")
(sdegeo:create-cuboid (position -0.4 0.0 0.05) (position 0.4 1.0 0.5)
"Nitride" "R.Spacer")
(sdegeo:set-default-boolean "ABA")
(sdegeo:create-cuboid (position -0.2 0.0 0.05) (position 0.2 1.0 0.5)
"PolySi" "R.Poly")
(sdegeo:create-cuboid (position -1.0 0.5 0.0) (position 1.0 1.0 -0.5)
"Oxide" "R.STI")
(sdegeo:set-default-boolean "ABA")
(define TMP (sdegeo:create-sphere (position -0.75 0.25 0.0) 0.2
"Silicide" "R.Silicide"))
(sdegeo:delete-region TMP)

Assigning an existing face to the “substrate” contact:

(sdegeo:define-contact-set "substrate" 4 (color:rgb 1 0 0) "##")
(sdegeo:set-current-contact-set "substrate")
(sdegeo:define-3d-contact (find-face-id (position 0.0 0.5 -1.0))
(sdegeo:get-current-contact-set))
(render:rebuild)

Imprinting a rectangle on a face in the base work plane, and assigning the new face to the
“drain” contact:

(define DRAINFACE (sdegeo:imprint-rectangular-wire
(position 0.5 0.45 0) (position 0.95 0.05 0)))
(sdegeo:define-contact-set "drain" 4  (color:rgb 0 1 0) "||")
(sdegeo:set-current-contact-set "drain")
(sdegeo:define-3d-contact DRAINFACE (sdegeo:get-current-contact-set))
(render:rebuild)

Imprinting a rectangle on a face in a custom work plane (“Sidewall”), and assigning the new
face to the “thermode” contact:

(sdegeo:define-work-plane "Sidewall" (position -1 1 -1) (position -1 0 -1)
(position -1 1 0))
(sdegeo:set-active-work-plane "Sidewall")
(define THERMFACE (sdegeo:imprint-rectangular-wire
(position 0.05 0.05 0)  (position 0.95 0.45 0)))
(sdegeo:define-contact-set "thermode" 4 (color:rgb 0 1 0) "//")
(sdegeo:set-current-contact-set "thermode")
(sdegeo:set-active-work-plane "base")
(sdegeo:define-3d-contact THERMFACE (sdegeo:get-current-contact-set))
(render:rebuild)

Imprinting a polygon on a general face using exploited 3D coordinates, and adding the new
face to the “thermode” contact:

(define THERMFACE_2 (sdegeo:imprint-polygonal-wire (list
(position 1.0 0.05 -0.95) (position 1.0 0.95 -0.95)
(position 1.0 0.95 -0.55) (position 1.0 0.45 -0.55)
(position 1.0 0.45 -0.05) (position 1.0 0.05 -0.05)
(position 1.0 0.05 -0.95))))
(sdegeo:define-3d-contact THERMFACE_2 (sdegeo:get-current-contact-set))
(render:rebuild)

Assigning all region boundary faces to the “gate” contact:

(sdegeo:define-contact-set "gate" 4 (color:rgb 0 0 1) "==")
(sdegeo:set-current-contact-set "gate")
(sdegeo:set-contact-boundary-faces (find-body-id (position 0.0 0.5 0.3)))
(sdegeo:delete-region (find-body-id (position 0.0 0.5 0.3))))

截图130

未完待续，随缘更新

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