符合SEMI E4, E5, E30, E37 的 SECS/GEM通讯方案

遵循 SEMI 人机交互设计，提供触摸屏支持让你触手可及。

毫米级的响应，让设备行云流水般流畅。

我们为你快速搭建PLC与MES之间的SECS/GEM桥梁

SECS/GEM介绍

SECS/GEM定义半导体生产设备与主机之间的通讯关系，通讯标准。SECS/GEM通讯规则如下图，FAB负责MES进行控制整个车间的生产。

符合SEMI E4, E5, E30, E37 的 SECS/GEM通讯方案

遵循 SEMI 人机交互设计，提供触摸屏支持让你触手可及。

毫米级的响应，让设备行云流水般流畅。

我们为你快速搭建PLC与MES之间的桥梁，无后顾之忧

增删改上报数据配置简单，并且一目了然

大量的数据处理无需关心

MES数据请求交由控制软件

采用高并发多线程处理，快速编码与解编码

强大的日志功能，可查询近一周的情况

可视化中文界面让您的简单易学

可搭配精小玲珑的超高性能主机

方案是如此的简单齐全，快速的搭建通讯成为自动化设备成为你突出的优势。

但是！！！！！但是我们SECS/GEM还远远不止这些！！这就是与其他厂商的不同点所在：

设备供应商不需要关心SECS/GEM的实现，里面已经集成Event和支持动态配置报表Report，数据上报等大量内容，最最最主要的是，我们是毫秒级响应，不像一些供应商。采用XML或者ini进行中间转发，那速度你也是明白的。

当你们需要添加新资料时候，随时可以自行添加，或者咨询我们添加方法。添加方法我们会在交付时候进行指导得清清楚楚。这些SECS/GEM内容我们都会保存在本地，无需担心开机与关机导致数据丢失问题。

SECS/GEM远程控制我们采用回调处理方式，在第一时间内反馈给你。

我们时刻遵循着最新的协议，让你的设备走在行业领先。功能全方位考虑清楚，久经考验。

In many equipment control applications there is a need for a GEM host to modify one or a small set of

process parameters associated with a recipe. The number of parameters modified, frequency of modification (e.g.,

wafer-to-wafer, batch-to-batch, etc.), range of modification, etc., is largely a function of the equipment control

application. Utilizing SECS/GEM, at least two methods are envisioned for modifying process parameters on a tool. With the

first method, ‘Equipment Constants’ can be used to relate process parameters of the updated recipe. Equipment

Constants can also be used in a mode where they relate suggested modifications to process parameters from the stored

recipe; that is, the constants contain only the ± differential from a nominal value. The former mode is preferred because

it better ensures data integrity between the controller and tool. With the second method the entire recipe could be

downloaded, but this results in an enormous amount of communication overhead. Note that, in all cases, the Equipment

Constants do not replace the process parameters inside a recipe, but are associated with (e.g., linked to) these

parameters to relate modifications. The remainder of this application note provides a description of how process

parameter modification can be implemented using existing GEM capabilities. The method may be used in a SECS/GEM

compliant system provided that the specific GEM capabilities described are supported.

The equipment constants should represent the actual values of the process parameters with which they are

associated. Depending on the equipment operation and control application, the equipment constant could represent

the actual value of a process parameter at a recipe step, or over the entire recipe. The equipment constants could also

be utilized to represent the differentials of process parameters from nominal values. However it is important to note

that, when using differential values to relate process parameter modifications, any loss of synchronization between

equipment and host could result in an incorrect assessment of the value of a process setpoint by the host. Note also

that, upon system startup, and whenever the appropriate process parameters are modified, the equipment constants

should also be modified as necessary to always reflect the (absolute or relative) values of the associated process